W. Langheinrich

Conversion of silicon nitride into silicon dioxide through the influence of oxygen

I. Fränz, W. Langheinrich · Solid-State Electronics · 1971 · 63 citations

Chemical Engineering, Engineering, Applied Physics +7

An analytical model of MAGFET sensitivity including secondary effects using a continuous description of the geometric correction factor G

J.W.A. von Kluge, W. Langheinrich · IEEE Transactions on Electron Devices · 1999 · 49 citations

Device Modeling, Magnetism, Electrical Engineering +12

Application of oxygen plasma processing to silicon direct bonding

O. Zucker, W. Langheinrich, M. Kulozik et al. · Sensors and Actuators A Physical · 1993 · 39 citations

Materials Science, Engineering, Microfabrication +7

Nanostructure fabrication using lithium fluoride films as an electron beam resist

W. Langheinrich, Bernd Spangenberg, H. Beneking · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 27 citations

Engineering, Electron-beam Lithography, Pattern Transfer +20

Highly Reliable Flash Memory with Self-Aligned Split-Gate Cell Embedded into High Performance 65nm CMOS for Automotive & Smartcard Applications

D. Shum, J. R. Power, Rudolf Ullmann et al. · 2012 · 24 citations

Non-volatile Memory, Electrical Engineering, Gate Spacer +15