H. Beneking is an author at FH Aachen specializing in applied physics, microelectronics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsPhotonicsThin FilmsNanomaterialsNanotechnologyNanofabricationOptoelectronics
Publications per year
1985–1992
2
2
Nanostructure fabrication using lithium fluoride films as an electron beam resist
W. Langheinrich, Bernd Spangenberg, H. Beneking · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 27 citations
Engineering, Electron-beam Lithography, Pattern Transfer +20
Rows per page
1–2 of 2