Concepedia

Norbert Gellrich

NG

1

Publications

10

Citations

1

H-Index

1985

Active since

Affiliations

Siemens (Germany)(Current)

Norbert Gellrich is an author at Siemens (Germany) specializing in optical properties, photonics, and applied physics.

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Publications per year

1985–1985

1

Publications

1

An improved trilevel resist system for submicron optical lithography

Norbert Gellrich, H. Beneking, Wolfgang Arden · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 10 citations

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