62
Publications
1.7K
Citations
23
H-Index
1989
Active since
Bernd Spangenberg is an author at Offenburg University of Applied Sciences specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectrical EngineeringPhysicsNanoelectronicsAnalytical ChemistryMedicineChromatography
Publications per year
1989–2017
62
62
Fabrication of nanostructures using a UV-based imprint technique
Markus Bender, Martin Otto, B. Hadam et al. · Microelectronic Engineering · 2000 · 123 citations
Fabrication of silicon and metal nanowires and dots using mechanical atomic force lithography
Sijung Hu, Amin Hamidi, Stefan Altmeyer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 82 citations
Engineering, Mechanical Nanolithography, Mechanical Engineering +17
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