Concepedia

M. Kulozik

MK

1

Publications

39

Citations

1

H-Index

1993

Active since

Affiliations

Robert Bosch (Germany)(Current)

M. Kulozik is an author at Robert Bosch (Germany) specializing in microfabrication, engineering, and applied physics.

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Publications per year

1993–1993

1

Publications

1

Application of oxygen plasma processing to silicon direct bonding

O. Zucker, W. Langheinrich, M. Kulozik et al. · Sensors and Actuators A Physical · 1993 · 39 citations

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