Burn J. Lin

Deep uv lithography

Burn J. Lin · Journal of Vacuum Science and Technology · 1975 · 159 citations

Engineering, Materials Engineering, Materials Science +15

Ultrafast deep UV Lithography with excimer lasers

Kanti Jain, C. Grant Willson, Burn J. Lin · IEEE Electron Device Letters · 1982 · 92 citations

Engineering, Materials Engineering, Materials Science +16

Immersion lithography and its impact on semiconductor manufacturing

Burn J. Lin · Journal of Micro/Nanolithography MEMS and MOEMS · 2004 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +10

<title>Modeling High Numerical Aperture Optical Lithography</title>

Michael Yeung, Burn J. Lin · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1988 · 56 citations

Natural Sciences, Materials Engineering, Computational Electromagnetics +14

Partially coherent imaging in two dimensions and the theoretical limits of projection printing in microfabrication

Burn J. Lin · IEEE Transactions on Electron Devices · 1980 · 54 citations

Engineering, Manufacturing Engineering, Additive Manufacturing +15