Statistics
Publications
14
Citations
436
H-Index
11
Active since
1988
Michael Yeung is an author at Boston University specializing in computational electromagnetics, natural sciences, and materials science.
Publications per year
1988–2016
14
14
Extending optics to 50 nm and beyond with immersion lithography
M. Switkes, Roderick R. Kunz, M. Rothschild et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 34 citations
Natural Sciences, Materials Engineering, Materials Science +17
Michael Yeung, Derek Lee, Robert S. Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 30 citations
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