Statistics
Publications
8
Citations
272
H-Index
8
Active since
1994
Akira Izumi is an author at Tokyo Institute of Technology specializing in materials science, natural sciences, and materials engineering.
Publications per year
1994–2005
8
8
Reduction of oxide layer on Ru surface by atomic-hydrogen treatment
Iwao Nishiyama, Hiroaki Oizumi, Kumi Motai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 58 citations
Natural Sciences, Materials Engineering, Materials Science +17
Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer
Hiroaki Oizumi, Hiromasa Yamanashi, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 32 citations
Natural Sciences, Materials Engineering, Materials Science +17
N. S. Sokolov, N. N. Faleev, S. V. Gastev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +17
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