Concepedia

Author

Hiromasa Yamanashi

Association of Super-Advanced Electronics

Also Known As

H. Yamanashi, Hiromasa Yamanashi, Hiromasa Yamanashi Hiromasa Yamanashi

62

Publications

258

Citations

8

H-Index

26

Concepts

All Affiliations

Association of Super-Advanced ElectronicsHitachi (Japan)
HY

About

Hiromasa Yamanashi is an author at Association of Super-Advanced Electronics specializing in engineering, applied physics, and surface science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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5

87

2

Applied Physics

5

5

87

3

Education

1

1

18

4

Natural Sciences

1

1

13

5

Chemical Engineering

1

1

32

Hiromasa Yamanashi

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5

Publications

87

Citations

5

H-Index

YearCitations

Contamination removal from EUV multilayer using atomic hydrogen generated by heated catalyzer

Hiroaki Oizumi, Hiromasa Yamanashi, Iwao Nishiyama,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2005

32

Study of Measurement Condition Optimization in Critical Dimension-Scanning Electron Microscope

Keiichiro Hitomi, Yoshinori Nakayama, Hiromasa Yamanashi,

Japanese Journal of Applied Physics

2008

18

Resist pattern fluctuation limits in extreme-ultraviolet lithography

E.W. Scheckler, Taro Ogawa, Hiromasa Yamanashi,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1994

13

Performance and quality analysis of Mo–Si multilayers formed by ion-beam and magnetron sputtering for extreme ultraviolet lithography

Kenji Hiruma, Shinji Miyagaki, Hiromasa Yamanashi,

Thin Solid Films

2007

13

Influence of glass substrate surface roughness on extreme ultraviolet reflectivity of Mo∕Si multilayer

Shinji Miyagaki, Hiromasa Yamanashi, Atsuko Yamaguchi,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2004

11

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