Concepedia

E.W. Scheckler

ES

Statistics

Publications

10

Citations

229

H-Index

10

Active since

1990

Affiliations

University of California, Berkeley(Current)

Hitachi (Japan)

Intel (United States)

E.W. Scheckler is an author at University of California, Berkeley specializing in 3d modeling, computer engineering, and engineering.

Publications per year

1990–2005

10

Publications

10

Models and algorithms for three-dimensional topography simulation with SAMPLE-3D

E.W. Scheckler, Andrew R. Neureuther · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1994 · 49 citations

Architecture, Computational Engineering, Computer Engineering +14

Algorithms for simulation of three-dimensional etching

K.K.H. Toh, A. R. Neureuther, E.W. Scheckler · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1994 · 41 citations

Engineering, Computer Engineering, Manufacturing Engineering +15

An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification

E.W. Scheckler, N. Tam, Anton K. Pfau et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1993 · 31 citations

Engineering, Materials Engineering, Materials Science +14

Molecular Scale E-Beam Resist Development Simulation for Pattern Fluctuation Analysis

E.W. Scheckler, S. Shukuri, Eiji Takeda · Japanese Journal of Applied Physics · 1993 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

3D Lithography, Etching, and Deposition Simulation (Sample-3D)

E.W. Scheckler, K.K.H. Toh, D. Hoffstetter et al. · 1991 · 19 citations

Engineering, Computational Engineering, Materials Engineering +17

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