Concepedia

Anton K. Pfau

AK

Statistics

Publications

2

Citations

44

H-Index

2

Active since

1993

Affiliations

University of California, Berkeley(Current)

Anton K. Pfau is an author at University of California, Berkeley specializing in phase shift masks, engineering, and materials engineering.

Publications per year

1993–1993

2

Publications

2

An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification

E.W. Scheckler, N. Tam, Anton K. Pfau et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1993 · 31 citations

Engineering, Materials Engineering, Materials Science +14

Systematic design of phase-shifting masks with extended depth of focus and/or shifted focus plane

Y. Liu, Anton K. Pfau, Avideh Zakhor · IEEE Transactions on Semiconductor Manufacturing · 1993 · 13 citations

Engineering, Biomedical Engineering, Biomedical Optics +12

1–2 of 2