Concepedia

Y. Liu

YL

Statistics

Publications

2

Citations

120

H-Index

2

Active since

1992

Affiliations

University of California, Berkeley(Current)

Y. Liu is an author at University of California, Berkeley specializing in phase shift mask design, mask fabrication, and digital imaging.

Publications per year

1992–1993

2

Publications

2

Binary and phase shifting mask design for optical lithography

Y. Liu, Avideh Zakhor · IEEE Transactions on Semiconductor Manufacturing · 1992 · 107 citations

, , +16

Systematic design of phase-shifting masks with extended depth of focus and/or shifted focus plane

Y. Liu, Anton K. Pfau, Avideh Zakhor · IEEE Transactions on Semiconductor Manufacturing · 1993 · 13 citations

, , +12

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