Deborah J. Riley

Mechanisms of Particle Deposition from Ultrapure Chemicals onto Semiconductor Wafers: Deposition from Bulk Liquid during Wafer Submersion

Deborah J. Riley, Ruben G. Carbonell · Journal of Colloid and Interface Science · 1993 · 38 citations

Materials Science, Particle Deposition, Wafer Scale Processing +11

Layout Variation Effects in Advanced MOSFETs: STI-Induced Embedded SiGe Strain Relaxation and Dual-Stress-Liner Boundary Proximity Effect

Youn Sung Choi, Guoda Lian, C. B. Vartuli et al. · IEEE Transactions on Electron Devices · 2010 · 22 citations

Electrical Engineering, Esige Profile, Engineering +15

Mechanisms of Particle Deposition from Ultrapure Chemicals onto Semiconductor Wafers: Deposition from a Thin Film of Drying Rinse Water

Deborah J. Riley, Ruben G. Carbonell · Journal of Colloid and Interface Science · 1993 · 12 citations

Materials Science, Particle Deposition, Engineering +10

Challenges in Integrating the High-K Gate Dielectric Film to the Conventional Cmos Process Flow

Avinash Kumar Ágarwal, M. B. Freiler, P. Lysaght et al. · MRS Proceedings · 2001 · 11 citations

Electrical Engineering, Engineering, Advanced Packaging (Semiconductors) +7

Wet Etch Enhancement of HfO<sub>2</sub> Films by Implant Processing

Joel Barnett, Deborah J. Riley, Troy C. Messina et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 2003 · 11 citations · Full text

Engineering, Microfabrication, Surface Science +6