Concepedia

Author

M. B. Freiler

Columbia University

Also Known As

M B Freiler, M. B. Freiler, M. Freiler, M.B. Freiler, Michael B. Freiler, Michael Freiler

20

Publications

176

Citations

7

H-Index

32

Concepts

All Affiliations

Columbia UniversityASM International
MB

About

M. B. Freiler is an author at Columbia University specializing in applied physics, engineering, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

7

7

155

2

Applied Physics

7

7

155

3

Electrical Engineering

3

3

86

4

Chemical Engineering

1

1

19

5

Computer Engineering

1

1

14

M. B. Freiler

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7

Publications

155

Citations

7

H-Index

YearCitations

Conventional n-channel MOSFET devices using single layer HfO/sub 2/ and ZrO/sub 2/ as high-k gate dielectrics with polysilicon gate electrode

Yudong Kim, G. Gebara, M. B. Freiler,

2002

61

Patterned, photon-driven cryoetching of GaAs and AlGaAs

Ming Chang Shih, M. B. Freiler, R. Scarmozzino,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1995

19

Fabrication of micrometer-scale structures on GaAs and GaAs/AlGaAs quantum well material using microcontact printing

E Kim, George M. Whitesides, M. B. Freiler,

Nanotechnology

1996

19

Fabrication of an InGaAs single quantum well circular ring laser by direct laser patterning

Ming Chang Shih, Mingxu Hu, M. B. Freiler,

Applied Physics Letters

1995

17

Integration of high-k gate stack systems into planar CMOS process flows

Howard R. Huff, Avinash Kumar Ágarwal, Y. Kim,

2002

14

Condensed chlorine etching of GaAs induced by excimer laser radiation

Ming Chang Shih, M. B. Freiler, G. Haase,

Applied Physics Letters

1992

14

Challenges in Integrating the High-K Gate Dielectric Film to the Conventional Cmos Process Flow

Avinash Kumar Ágarwal, M. B. Freiler, P. Lysaght,

MRS Proceedings

2001

11

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