M. B. Freiler

Conventional n-channel MOSFET devices using single layer HfO/sub 2/ and ZrO/sub 2/ as high-k gate dielectrics with polysilicon gate electrode

Yudong Kim, G. Gebara, M. B. Freiler et al. · 2002 · 61 citations

Zro/sub 2//Poly-si Transistors, Electrical Engineering, Zro/sub 2/ +13

Patterned, photon-driven cryoetching of GaAs and AlGaAs

Ming Chang Shih, M. B. Freiler, R. Scarmozzino et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 19 citations

Optical Materials, Engineering, Laser Applications +18

Fabrication of micrometer-scale structures on GaAs and GaAs/AlGaAs quantum well material using microcontact printing

E Kim, George M. Whitesides, M. B. Freiler et al. · Nanotechnology · 1996 · 19 citations

Engineering, Electron-beam Lithography, Micro-optical Component +21

Fabrication of an InGaAs single quantum well circular ring laser by direct laser patterning

Ming Chang Shih, Mingxu Hu, M. B. Freiler et al. · Applied Physics Letters · 1995 · 17 citations

Optical Pumping, Photonics, Strained Ingaas +14

Integration of high-k gate stack systems into planar CMOS process flows

Howard R. Huff, Avinash Kumar Ágarwal, Y. Kim et al. · 2002 · 14 citations

Engineering, Vlsi Design, Computer Architecture +19