Concepedia

Tsukasa Azuma

TA

Statistics

Publications

14

Citations

327

H-Index

12

Active since

1998

Affiliations

Toshiba (Japan)(Current)

Tokyo Electron (Japan)

Tokyo Institute of Technology

Cornell University

Tsukasa Azuma is an author at Toshiba (Japan) specializing in materials science, materials engineering, and natural sciences.

Publications per year

1998–2017

14

Publications

14

Perpendicular Orientation Control without Interfacial Treatment of RAFT-Synthesized High-χ Block Copolymer Thin Films with Sub-10 nm Features Prepared via Thermal Annealing

Ryuichi Nakatani, Hiroki Takano, Alvin Chandra et al. · ACS Applied Materials & Interfaces · 2017 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +17

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method

Katsuyoshi Kodera, Shimon Maeda, Satoshi Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Natural Sciences, Materials Science, Physics +13

Sub-30nm via interconnects fabricated using directed self-assembly

Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu et al. · Microelectronic Engineering · 2013 · 24 citations

Engineering, Computer Engineering, Electrical Engineering +10

Contact hole shrink process using directed self-assembly

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +16

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