Concepedia

Shimon Maeda

SM

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Publications

3

Citations

51

H-Index

3

Active since

2013

Affiliations

Toshiba (Japan)(Current)

Shimon Maeda is an author at Toshiba (Japan) specializing in optical lithography, natural sciences, and hotspot analysis.

Publications per year

2013–2014

3

Publications

3

Novel error mode analysis method for graphoepitaxial directed self-assembly lithography based on the dissipative particle dynamics method

Katsuyoshi Kodera, Shimon Maeda, Satoshi Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Natural Sciences, Materials Science, Physics +13

Hotspot prevention and detection method using an image-recognition technique based on higher-order local autocorrelation

Hirokazu Nosato, Hidenori Sakanashi, Eiichi Takahashi et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 13 citations

Engineering, Computer Engineering, Computer Science +17

Optimization of directed self-assembly hole shrink process with simplified model

Kenji Yoshimoto, Ken Fukawatase, Masahiro Ohshima et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 12 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

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