Concepedia

Takumi Ueno

TU

20

Publications

423

Citations

13

H-Index

1985

Active since

Affiliations

Hitachi (Japan)(Current)

Takumi Ueno is an author at Hitachi (Japan) specializing in engineering, chemistry, and chemical engineering.

ORCID

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Publications per year

1985–2023

20

Publications

20

Determination of acid diffusion in chemical amplification positive deep ultraviolet resists

Leo Schlegel, Takumi Ueno, Nobuaki Hayashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 74 citations

, , +18

Nanometer-scale imaging characteristics of novolak resin-based chemical amplification negative resist systems and molecular weight distribution effects of the resin matrix

Hiroshi Shiraishi, Toshiyuki Yoshimura, Toshio Sakamizu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 37 citations

, , +13

Tetrahydropyranyl‐ and furanyl‐protected polyhydroxystyrene in chemical amplification systems

Simon A.M. Hesp, Nobuaki Hayashi, Takumi Ueno · Journal of Applied Polymer Science · 1991 · 37 citations

Transparent, Electrically Conductive Composites Derived from Polypyrrole and Poly[Vinyl Chloride) by Vapor-Phase Polymerization: Effect of Environment on Polymerization and Reaction Mechanism

Takumi Ueno, Hans-Detlef Arntz, Sabine Flesch et al. · Journal of Macromolecular Science Part A - Chemistry · 1988 · 33 citations

Determination of Acid Diffusion in Chemical Amplification Positive Deep-UV Resists

Leo Schlegel, Takumi Ueno, N. Hayashi et al. · Japanese Journal of Applied Physics · 1991 · 30 citations

, , +13

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