Statistics
Publications
6
Citations
159
H-Index
6
Active since
1989
Affiliations
Hitachi (Japan)(Current)
Leo Schlegel is an author at Hitachi (Japan) specializing in chemistry, natural sciences, and chemical engineering.
Publications per year
1989–1993
6
6
Determination of acid diffusion in chemical amplification positive deep ultraviolet resists
Leo Schlegel, Takumi Ueno, Nobuaki Hayashi et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 75 citations
Natural Sciences, Materials Science, Electronic Materials +12
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