Concepedia

Yusuke Kondo

YK

Statistics

Publications

10

Citations

234

H-Index

10

Active since

2000

Affiliations

Nagoya University(Current)

Tohoku University

Yusuke Kondo is an author at Nagoya University specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsChemistryMicroelectronicsMicrofabricationChemical EngineeringElectrical Engineering

Publications per year

2000–2024

10

Publications

10

High-pressure phase transition and behavior of protons in brucite Mg(OH) 2 : a high-pressure-temperature study using IR synchrotron radiation

Keiji Shinoda, M. Yamakata, Tetsuya Nanba et al. · Physics and Chemistry of Minerals · 2002 · 43 citations

Materials Science, Ir Synchrotron Radiation, Mineral Physic +9

Formation mechanism of sidewall striation in high-aspect-ratio hole etching

Mitsuhiro Omura, Jun-ichi Hashimoto, Takahiro ADACHI et al. · Japanese Journal of Applied Physics · 2019 · 40 citations

Engineering, Plasma Processing, Ion Implantation +17

Highly Selective Etching of SiO<sub>2</sub> over Si<sub>3</sub>N<sub>4</sub> and Si in Capacitively Coupled Plasma Employing C<sub>5</sub>HF<sub>7</sub> Gas

Yudai Miyawaki, Yusuke Kondo, Makoto Sekine et al. · Japanese Journal of Applied Physics · 2012 · 36 citations

Selective Etching, Engineering, Vacuum Device +19

Silicon nitride etching performance of CH<sub>2</sub>F<sub>2</sub>plasma diluted with argon or krypton

Yusuke Kondo, Kenji Ishikawa, Toshio Hayashi et al. · Japanese Journal of Applied Physics · 2015 · 22 citations

Materials Engineering, Materials Science, Chemical Engineering +14

In Situ Infrared Observation of Etching and Oxidation Processes on Si Surfaces in NH[sub 4]F Solution

Michio Niwano, Yusuke Kondo, Yasuo Kimura · Journal of The Electrochemical Society · 2000 · 22 citations

Optical Materials, Engineering, Chemistry +19

1–5 of 10