Concepedia

Yudai Miyawaki

YM

Statistics

Publications

9

Citations

198

H-Index

9

Active since

2011

Affiliations

Nagoya University(Current)

Yudai Miyawaki is an author at Nagoya University specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryChemical EngineeringPhysicsNanoelectronicsPlasma ConfinementMaterials Engineering

Publications per year

2011–2015

9

Publications

9

Mechanism of plasma-induced damage to low-k SiOCH films during plasma ashing of organic resists

Keigo Takeda, Yudai Miyawaki, Seigo Takashima et al. · Journal of Applied Physics · 2011 · 40 citations

Materials Science, Materials Engineering, Chemical Engineering +15

Highly Selective Etching of SiO<sub>2</sub> over Si<sub>3</sub>N<sub>4</sub> and Si in Capacitively Coupled Plasma Employing C<sub>5</sub>HF<sub>7</sub> Gas

Yudai Miyawaki, Yusuke Kondo, Makoto Sekine et al. · Japanese Journal of Applied Physics · 2012 · 36 citations

Selective Etching, Engineering, Vacuum Device +19

Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process

Bibhuti B. Sahu, Jeon G. Han, Kyung Sik Shin et al. · Plasma Sources Science and Technology · 2015 · 29 citations

Engineering, Radio Frequency, Chemistry +19

Silicon nitride etching performance of CH<sub>2</sub>F<sub>2</sub>plasma diluted with argon or krypton

Yusuke Kondo, Kenji Ishikawa, Toshio Hayashi et al. · Japanese Journal of Applied Physics · 2015 · 22 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Wavelength Dependence of Photon-Induced Interface Defects in Hydrogenated Silicon Nitride/Si Structure during Plasma Etching Processes

Masanaga Fukasawa, Hiroyasu Matsugai, Takahiro Honda et al. · Japanese Journal of Applied Physics · 2013 · 20 citations

Engineering, Integrated Circuits, Vacuum Device +16

1–5 of 9