Kyung Sik Shin

Effectiveness of plasma diagnostic in ultra high frequency and radio frequency hybrid plasmas for synthesis of silicon nitride film at low temperature

Bibhuti B. Sahu, Kyung Sik Shin, Su B. Jin et al. · Journal of Applied Physics · 2014 · 31 citations

Engineering, Radio Frequency, Hybrid Plasmas +18

Plasma diagnostic approach for high rate nanocrystalline Si synthesis in RF/UHF hybrid plasmas using a PECVD process

Bibhuti B. Sahu, Jeon G. Han, Kyung Sik Shin et al. · Plasma Sources Science and Technology · 2015 · 29 citations

Engineering, Radio Frequency, Chemistry +19

Integrated approach for low-temperature synthesis of high-quality silicon nitride films in PECVD using RF–UHF hybrid plasmas

Bibhuti B. Sahu, Kyung Sik Shin, Jeon G. Han · Plasma Sources Science and Technology · 2016 · 25 citations

Optical Materials, Engineering, Radio Frequency +19

Tailoring of microstructure in hydrogenated nanocrystalline Si thin films by ICP-assisted RF magnetron sputtering

Kyung Sik Shin, Bibhuti B. Sahu, Manish Kumar et al. · Journal of Physics D Applied Physics · 2015 · 22 citations

Magnetic Properties, Engineering, Plasma Physics +20

Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N₂/SiH₄ PECVD Process

Bibhuti B. Sahu, Jeon G. Han, Kyung Sik Shin et al. · Plasma Processes and Polymers · 2015 · 21 citations

Nitrogen Radical, Engineering, Plasma Science +17