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Hiroyasu Matsugai

HM

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Publications

2

Citations

30

H-Index

2

Active since

2012

Affiliations

Nagoya University(Current)

Hiroyasu Matsugai is an author at Nagoya University specializing in optoelectronics, applied physics, and engineering.

Top concepts

Publications per year

2012–2013

2

Publications

2

Wavelength Dependence of Photon-Induced Interface Defects in Hydrogenated Silicon Nitride/Si Structure during Plasma Etching Processes

Masanaga Fukasawa, Hiroyasu Matsugai, Takahiro Honda et al. · Japanese Journal of Applied Physics · 2013 · 20 citations

, , +16

Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation

Masanaga Fukasawa, Yudai Miyawaki, Yusuke Kondo et al. · Japanese Journal of Applied Physics · 2012 · 10 citations

, , +20

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