Seigo Takashima

Evanescent-field fluorescence-assisted lectin microarray: a new strategy for glycan profiling

Atsushi Kuno, Noboru Uchiyama, Shiori Koseki‐Kuno et al. · Nature Methods · 2005 · 511 citations

Life Sciences, Biochemistry, Molecular Biology +15

Plasma damage mechanisms for low-k porous SiOCH films due to radiation, radicals, and ions in the plasma etching process

Saburo Uchida, Seigo Takashima, Masaru Hori et al. · Journal of Applied Physics · 2008 · 141 citations

Natural Sciences, Materials Engineering, Materials Science +16

Development of measurement technique for carbon atoms employing vacuum ultraviolet absorption spectroscopy with a microdischarge hollow-cathode lamp and its application to diagnostics of nanographene sheet material formation plasmas

Wakana Takeuchi, H. Sasaki, Satoru Kato et al. · Journal of Applied Physics · 2009 · 52 citations

Natural Sciences, Materials Science, Physics +16

Mechanism of plasma-induced damage to low-k SiOCH films during plasma ashing of organic resists

Keigo Takeda, Yudai Miyawaki, Seigo Takashima et al. · Journal of Applied Physics · 2011 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +15

Development of atomic radical monitoring probe and its application to spatial distribution measurements of H and O atomic radical densities in radical-based plasma processing

Shunji Takahashi, Seigo Takashima, Kōji Yamakawa et al. · Journal of Applied Physics · 2009 · 33 citations

Natural Sciences, Chemistry, Physics +13