Concepedia

Saburo Uchida

SU

Statistics

Publications

3

Citations

182

H-Index

3

Active since

2008

Affiliations

Nagoya University(Current)

Saburo Uchida is an author at Nagoya University specializing in applied physics, surface science, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemical EngineeringElectrical InsulationMaterials EngineeringChemistryThin FilmsMicroelectronics

Publications per year

2008–2008

3

Publications

3

Plasma damage mechanisms for low-k porous SiOCH films due to radiation, radicals, and ions in the plasma etching process

Saburo Uchida, Seigo Takashima, Masaru Hori et al. · Journal of Applied Physics · 2008 · 139 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Evaluation of Property Changes due to Radiation, Radicals, and Ions on Organic Low-k Films in H<sub>2</sub>/N<sub>2</sub> Plasma Etching

Saburo Uchida, Seigo Takashima, Masaru Hori et al. · Japanese Journal of Applied Physics · 2008 · 25 citations

Engineering, Par Film, Property Changes +18

Surface reactions during low-k etching using H2∕N2 plasma

Masanaga Fukasawa, Tetsuya Tatsumi, Keiji Oshima et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 18 citations

Materials Science, Chemical Engineering, Engineering +12

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