R. L. Kubena

Shot-noise and edge roughness effects in resists patterned at 10 nm exposure

Nicholas Rau, Fred P. Stratton, Charles H. Fields et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 40 citations

Engineering, Electron-beam Lithography, Ion Beam Instrumentation +18

Computer simulation of current density profiles in focused ion beams

J. W. Ward, M. Utlaut, R. L. Kubena · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 36 citations

Unity Magnification, Engineering, Target Current Density +12

A new tunneling-based sensor for inertial rotation rate measurements

R. L. Kubena, Deborah J. Vickers-Kirby, R. J. Joyce et al. · Sensors and Actuators A Physical · 2000 · 29 citations

Inertial Sensors, Engineering, Gyroscope +7

Phononic comb generation in high-Q quartz resonators

R. L. Kubena, Walter S. Wall, J. Koehl et al. · Applied Physics Letters · 2020 · 22 citations

Quantum Science, Photonics, Engineering +15

Microelectromechanical tunneling sensor fabrication and post-processing characterization using focused ion beams

F. P. Stratton, R. L. Kubena, H. H. McNulty et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 15 citations

Engineering, Electron-beam Lithography, Microscopy +30