3
Publications
73
Citations
3
H-Index
1993
Active since
Affiliations
Charles H. Fields is an author at HRL Laboratories (United States) specializing in engineering, electrical engineering, and instrumentation.
Top concepts
EngineeringInstrumentationOptoelectronicsMicroelectronicsElectrical EngineeringRadarPhysicsMedicineRadiologyMicroscopy
Publications per year
1993–2010
3
3
Shot-noise and edge roughness effects in resists patterned at 10 nm exposure
Nicholas Rau, Fred P. Stratton, Charles H. Fields et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 40 citations
Engineering, Electron-beam Lithography, Ion Beam Instrumentation +18
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