Statistics
Publications
7
Citations
333
H-Index
7
Active since
1986
Nicholas Rau is an author at University of Regensburg specializing in engineering, applied physics, and optical properties.
Publications per year
1986–2020
7
7
Marius Klein, Nicholas Rau, Mirco Wende et al. · Chemistry of Materials · 2020 · 92 citations
Shot-noise and edge roughness effects in resists patterned at 10 nm exposure
Nicholas Rau, Fred P. Stratton, Charles H. Fields et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 40 citations
Engineering, Electron-beam Lithography, Ion Beam Instrumentation +18
1–5 of 7