V. Benevent

Deposition, characterization and machining performance of multilayer PVD coatings on cemented carbide cutting tools

C. Ducros, V. Benevent, Frédéric Sanchette · Surface and Coatings Technology · 2002 · 140 citations

Engineering, Materials Engineering, Materials Science +14

First demonstration of a CMOS over CMOS 3D VLSI CoolCube™ integration on 300mm wafers

Laurent Brunet, P. Batude, C. Fenouillet-Béranger et al. · 2016 · 75 citations

Engineering, Computer Engineering, Electrical Engineering +16

New insights on bottom layer thermal stability and laser annealing promises for high performance 3D VLSI

C. Fenouillet-Béranger, B. Mathieu, B. Prévitali et al. · 2014 · 56 citations

Engineering, Electrical Engineering, Materials Science +17

A benchmarking of silane, disilane and dichlorosilane for the low temperature growth of group IV layers

Jean‐Michel Hartmann, V. Benevent, J.F. Damlencourt et al. · Thin Solid Films · 2011 · 51 citations

Natural Sciences, Chemistry, Materials Science +10

Epitaxial growth of Si and SiGe at temperatures lower than 500°C with disilane and germane

J. Aubin, Jean‐Michel Hartmann, V. Benevent · Thin Solid Films · 2015 · 19 citations

Engineering, Materials Engineering, Materials Science +12