Statistics
Publications
9
Citations
469
H-Index
9
Active since
2006
Affiliations
Chan-Hoon Park is an author at Pohang University of Science and Technology specializing in engineering, electrical engineering, and semiconductor devices.
Publications per year
2006–2024
9
9
Future of plasma etching for microelectronics: Challenges and opportunities
G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 145 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +15
1–5 of 9