A. Moel - Concepedia

Author

A. Moel

Also Known As

A. Moel, Alberto Moel, Alberto Moel Alberto Moel

Publications

Citations

H-Index

Concepts

All Affiliations

A. Moel is an author at Massachusetts Institute of Technology specializing in engineering, instrumentation, and nanotechnology.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	68
2	Applied Physics	2	2	32
3	Health Sciences	1	1	36
4	Materials Science	1	1	18
5	Physics	1	1	14

A. Moel

Publications

Citations

H-Index

Page 1

	Year	Citations
Novel on-axis interferometric alignment method with sub-10 nm precision A. Moel, Euclid E. Moon, Robert D. Frankel, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringMicroscopyOptical TestingInterferometrySub-10 Nm Precision	1993	36
Fabrication and characterization of high-flatness mesa-etched silicon nitride x-ray masks A. Moel, K. Early, Y. Ku, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Mask Design RequirementsEngineeringElectron-beam LithographyX-ray MasksTarget Fabrication	1991	18
A compact, low-cost system for sub-100 nm x-ray lithography A. Moel, Mark L. Schattenburg, J. M. Carter, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena EngineeringElectron-beam LithographyPhysicsMicroscopyNanotechnology	1990	14

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