Concepedia

A. Moel

AM

Statistics

Publications

3

Citations

68

H-Index

3

Active since

1990

Affiliations

Massachusetts Institute of Technology(Current)

A. Moel is an author at Massachusetts Institute of Technology specializing in engineering, instrumentation, and nanotechnology.

Top concepts

Publications per year

1990–1993

3

Publications

3

Novel on-axis interferometric alignment method with sub-10 nm precision

A. Moel, Euclid E. Moon, Robert D. Frankel et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 36 citations

, , +19

Fabrication and characterization of high-flatness mesa-etched silicon nitride x-ray masks

A. Moel, K. Early, Y. Ku et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 18 citations

, , +23

A compact, low-cost system for sub-100 nm x-ray lithography

A. Moel, Mark L. Schattenburg, J. M. Carter et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 14 citations

, , +13

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