Statistics
Publications
9
Citations
355
H-Index
9
Active since
1977
Robert D. Frankel is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and x-ray imaging.
Publications per year
1977–2003
9
9
Characteristics of target interaction with high power UV laser radiation
B. Yaakobi, T. R. Boehly, Paula Bourke et al. · Optics Communications · 1981 · 94 citations
Fabrication of sawtooth diffraction gratings using nanoimprint lithography
Chih‐Hao Chang, Ralf K. Heilmann, Robert C. Fleming et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 47 citations
Optical Materials, Engineering, Electron-beam Lithography +16
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