Katsumi Sugisaki

Effect of Sample Topography on Adhesive Force in Atomic Force Spectroscopy Measurements in Air

Lucel Sirghi, Nobuyuki Nakagiri, Katsumi Sugisaki et al. · Langmuir · 2000 · 65 citations

Engineering, Afm Tip, Adhesion Force +23

Lithographic performance of high-numerical-aperture (NA=0.3) EUV small-field exposure tool (HINA)

Hiroaki Oizumi, Yusuke Tanaka, Fumiaki Kumasaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 36 citations

Angular spectrum calculations for arbitrary focal length with a scaled convolution

Satoru Odate, Chiaki Koike, Hidemitsu Toba et al. · Optics Express · 2011 · 30 citations · Full text

Scaled Convolution, Engineering, Optic Design +17

Recent progress of EUV wavefront metrology in EUVA

Masanobu Hasegawa, Chidane Ouchi, T. Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

Geophysics, Engineering, Digital Talbot Interferometer +15

Comparison of EUV interferometry methods in EUVA project

Seima Kato, Chidane Ouchi, Masanobu Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

Euva Project, Adaptive Optic, Engineering +15