Concepedia

Masanobu Hasegawa

MH

12

Publications

194

Citations

10

H-Index

2002

Active since

Affiliations

University of Hyogo(Current)

Association of Super-Advanced Electronics

University of Electro-Communications

Canon (Japan)

Nikon (Japan)

Masanobu Hasegawa is an author at University of Hyogo specializing in engineering, instrumentation, and calibration.

Top concepts

Publications per year

2002–2018

12

Publications

12

Development of optical coatings for 157-nm lithography I Coating materials

Shunsuke Niisaka, Tadahiko Saito, Jun Saito et al. · Applied Optics · 2002 · 35 citations

EUV wavefront measurement of six-mirror optics using EWMS

K. Sugisaki, Masashi Okada, Katsura Otaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations

Recent progress of EUV wavefront metrology in EUVA

Masanobu Hasegawa, Chidane Ouchi, T. Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

, , +15

Comparison of EUV interferometry methods in EUVA project

Seima Kato, Chidane Ouchi, Masanobu Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

, , +15

Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu, Katsumi Sugisaki, Masashi Okada et al. · Applied Optics · 2007 · 17 citations

, , +17

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