Concepedia

Seima Kato

SK

7

Publications

130

Citations

7

H-Index

2002

Active since

Affiliations

University of Hyogo(Current)

University of Electro-Communications

Chubu University

Goddard Space Flight Center

Nagoya University

Seima Kato is an author at University of Hyogo specializing in instrumentation, engineering, and calibration.

Top concepts

EngineeringInstrumentationCalibrationInterferometryGeodesyOptical MeasurementEducationMeasurementOphthalmologyOptical System Analysis

Publications per year

2002–2007

7

Publications

7

Characterization of the supermirror hard-x-ray telescope for the InFOCµS balloon experiment

Takashi Okajima, Keisuke Tamura, Yasushi Ogasaka et al. · Applied Optics · 2002 · 39 citations

Recent progress of EUV wavefront metrology in EUVA

Masanobu Hasegawa, Chidane Ouchi, T. Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

Geophysics, Engineering, Digital Talbot Interferometer +15

Comparison of EUV interferometry methods in EUVA project

Seima Kato, Chidane Ouchi, Masanobu Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

Euva Project, Adaptive Optic, Engineering +15

Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu, Katsumi Sugisaki, Masashi Okada et al. · Applied Optics · 2007 · 17 citations

Engineering, Optical Testing, Interferometry +17

EUV wavefront metrology system in EUVA

T. Hasegawa, Chidane Ouchi, Masanobu Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 14 citations

Projection Optics, Engineering, Measurement +15

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