Concepedia

Yucong Zhu

YZ

Statistics

Publications

5

Citations

83

H-Index

5

Active since

2001

Affiliations

Nikon (Japan)(Current)

University of Hyogo

Association of Super-Advanced Electronics

Yucong Zhu is an author at Nikon (Japan) specializing in optics, interferometry, and interferometric measurement.

Publications per year

2001–2007

5

Publications

5

Method for designing error-compensating phase-calculation algorithms for phase-shifting interferometry

Yucong Zhu, Takashi Gemma · Applied Optics · 2001 · 25 citations

, , +12

Wavefront measurement interferometry at the operational wavelength of extreme-ultraviolet lithography

Yucong Zhu, Katsumi Sugisaki, Masashi Okada et al. · Applied Optics · 2007 · 18 citations

, , +13

Comparison of EUV interferometry methods in EUVA project

Seima Kato, Chidane Ouchi, Masanobu Hasegawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

, , +14

Shearing Interferometry for at Wavelength Wavefront Measurement of Extreme-Ultraviolet Lithography Projection Optics

Yucong Zhu, Katsumi Sugisaki, Katsuhiko Murakami et al. · Japanese Journal of Applied Physics · 2003 · 13 citations

, , +15

Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

Katsuhiko Murakami, Jun Saito, Kazuya Ota et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

, , +14

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