Timothy J. Sommerer

The 2012 Plasma Roadmap

Seiji Samukawa, Masaru Hori, Shahid Rauf et al. · Journal of Physics D Applied Physics · 2012 · 619 citations · Full text

Engineering, Plasma Roadmap, Plasma Science +17

Numerical investigation of the kinetics and chemistry of rf glow discharge plasmas sustained in He, N2, O2, He/N2/O2, He/CF4/O2, and SiH4/NH3 using a Monte Carlo-fluid hybrid model

Timothy J. Sommerer, Mark J. Kushner · Journal of Applied Physics · 1992 · 239 citations

Electrical Engineering, Rf Cycle, Engineering +15

Two-dimensional hybrid model of inductively coupled plasma sources for etching

Peter L. G. Ventzek, Timothy J. Sommerer, Robert J. Hoekstra et al. · Applied Physics Letters · 1993 · 156 citations

Engineering, Plasma Physics, Plasma Densities +17

Self-consistent kinetic model of the cathode fall of a glow discharge

Timothy J. Sommerer, W. N. G. Hitchon, J. E. Lawler · Physical review. A, General physics · 1989 · 131 citations

Electrical Engineering, Self-consistent Kinetic Model, Engineering +13

Monte Carlo-fluid hybrid model of the accumulation of dust particles at sheath edges in radio-frequency discharges

Timothy J. Sommerer, Michael Barnes, John H. Keller et al. · Applied Physics Letters · 1991 · 96 citations

Engineering, Glow Discharge, Particle Method +16