Statistics
Publications
80
Citations
4.7K
H-Index
35
Active since
1995
Shahid Rauf is an author at Applied Materials (United States) specializing in plasma physics, natural sciences, and physics.
Publications per year
1995–2024
80
80
Seiji Samukawa, Masaru Hori, Shahid Rauf et al. · Journal of Physics D Applied Physics · 2012 · 630 citations · Full text
Future of plasma etching for microelectronics: Challenges and opportunities
G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 145 citations · Full text
Engineering, Electrical Engineering, Manufacturing Engineering +15
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