M. Mazhar IslamRaja

A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias

M. Mazhar IslamRaja, Mark Cappelli, J.P. McVittie et al. · Journal of Applied Physics · 1991 · 84 citations

Engineering, Materials Engineering, Materials Science +17

Air-gap formation during IMD deposition to lower interconnect capacitance

B.P. Shieh, Krishna C. Saraswat, J.P. McVittie et al. · IEEE Electron Device Letters · 1998 · 64 citations

Engineering, Electrical Engineering, Materials Science +17

Chemical vapor deposition TiN process for contact/via barrier applications

Ajit Paranjpe, M. Mazhar IslamRaja · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +17

Two precursor model for low-pressure chemical vapor deposition of silicon dioxide from tetraethylorthosilicate

M. Mazhar IslamRaja, J.P. McVittie, Mark Cappelli et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +16

<title>SPEEDIE: a profile simulator for etching and deposition</title>

J.P. McVittie, Juan C. Rey, Anand J. Bariya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 32 citations

Engineering, Electrical Engineering, Materials Science +17