Concepedia

Author

M. Mazhar IslamRaja

Stanford University

Also Known As

M. Islamraja, M. M. IslamRaja, M. Mazhar IslamRaja, M.M. IslamRaja, M.M. Islamraja, Mazhar IslamRaja

10

Publications

280

Citations

6

H-Index

31

Concepts

All Affiliations

Stanford UniversityTexas Instruments (United States)
MM

About

M. Mazhar IslamRaja is an author at Stanford University specializing in applied physics, surface science, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

276

2

Applied Physics

6

6

276

3

Chemical Engineering

2

2

76

4

Chemistry

1

1

35

5

Civil Engineering

1

1

84

M. Mazhar IslamRaja

×

6

Publications

276

Citations

6

H-Index

YearCitations

A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias

M. Mazhar IslamRaja, Mark Cappelli, J.P. McVittie,

Journal of Applied Physics

1991

84

Air-gap formation during IMD deposition to lower interconnect capacitance

B.P. Shieh, Krishna C. Saraswat, J.P. McVittie,

IEEE Electron Device Letters

1998

64

Chemical vapor deposition TiN process for contact/via barrier applications

Ajit Paranjpe, M. Mazhar IslamRaja

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1995

41

Two precursor model for low-pressure chemical vapor deposition of silicon dioxide from tetraethylorthosilicate

M. Mazhar IslamRaja, J.P. McVittie, Mark Cappelli,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

1993

35

<title>SPEEDIE: a profile simulator for etching and deposition</title>

J.P. McVittie, Juan C. Rey, Anand J. Bariya,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1991

32

LPCVD profile simulation using a re-emission model

J.P. McVittie, Juan C. Rey, Liangliang Cheng,

2002

20

Page 1