Concepedia

Juan C. Rey

JC

Statistics

Publications

4

Citations

216

H-Index

4

Active since

1991

Affiliations

Stanford University(Current)

Juan C. Rey is an author at Stanford University specializing in materials science, etching processes, and semiconductor devices.

Publications per year

1991–2002

4

Publications

4

Model-based optical proximity correction including effects of photoresist processes

Jiangwei Li, Douglas A. Bernard, Juan C. Rey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 92 citations

Computing, Computational Engineering, Computational Electromagnetics +11

Monte Carlo low pressure deposition profile simulations

Juan C. Rey, Lie-Yea Cheng, J.P. McVittie et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +17

<title>SPEEDIE: a profile simulator for etching and deposition</title>

J.P. McVittie, Juan C. Rey, Anand J. Bariya et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 32 citations

Engineering, Electrical Engineering, Materials Science +17

LPCVD profile simulation using a re-emission model

J.P. McVittie, Juan C. Rey, Liangliang Cheng et al. · 2002 · 20 citations

Engineering, Materials Engineering, Materials Science +17

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