Concepedia

Lie-Yea Cheng

LC

Statistics

Publications

2

Citations

124

H-Index

2

Active since

1991

Affiliations

Stanford University(Current)

Lie-Yea Cheng is an author at Stanford University specializing in surface science, materials engineering, and chemical vapor deposition.

Publications per year

1991–1991

2

Publications

2

Monte Carlo low pressure deposition profile simulations

Juan C. Rey, Lie-Yea Cheng, J.P. McVittie et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 72 citations

, , +17

New test structure to identify step coverage mechanisms in chemical vapor deposition of silicon dioxide

Lie-Yea Cheng, J.P. McVittie, Krishna C. Saraswat · Applied Physics Letters · 1991 · 52 citations

, , +16

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