Concepedia

Douglas A. Bernard

DA

Statistics

Publications

8

Citations

224

H-Index

8

Active since

1982

Affiliations

Philips (Netherlands)(Current)

Douglas A. Bernard is an author at Philips (Netherlands) specializing in materials science, natural sciences, and optics.

Publications per year

1982–1997

8

Publications

8

Model-based optical proximity correction including effects of photoresist processes

Jiangwei Li, Douglas A. Bernard, Juan C. Rey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 92 citations

Computing, Computational Engineering, Computational Electromagnetics +11

Modeling latent-image formation in photolithography, using the Helmholtz equation

H. P. Urbach, Douglas A. Bernard · Journal of the Optical Society of America A · 1989 · 48 citations

Computing, Computational Engineering, Finite Element Analysis +14

Simulation of focus effects in photolithography

Douglas A. Bernard · IEEE Transactions on Semiconductor Manufacturing · 1988 · 23 citations

Natural Sciences, Materials Science, Physics +13

Zero-shear viscosity exponent and polydispersity effects

Douglas A. Bernard, Jaan Noolandi · Macromolecules · 1982 · 14 citations

Natural Sciences, Chemistry, Materials Science +17

Optical lithography simulation: Introduction to SPESA

Douglas A. Bernard · Microelectronic Engineering · 1985 · 13 citations

Engineering, Manufacturing Engineering, Materials Science +12

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