Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara, Xuwen Liu, Lauri Kilpi, +14

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringAluminum Oxide +8

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, +57

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringThin Film Process TechnologyChemistryChemical DepositionSurface Technology +15

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, +7

Acta Materialia

Materials ScienceAluminium NitrideEngineeringMechanical BehaviorShaft-loading Techniques +7

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Maria Berdova, Xuwen Liu, Claudia Wiemer, +5

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Hafnium Oxide-based FilmsEngineeringMechanical EngineeringThin Film Process TechnologyChemical Deposition +17

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova, Oili Ylivaara, Ville Rontu, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Membrane StructureEngineeringMechanical EngineeringMembrane CharacterizationThin Film Process Technology +14

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestutis Grigoras, +5

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceSurface TechnologySurface CharacterizationEngineeringMicrofabrication +13

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Maria Berdova, Claudia Wiemer, Alessio Lamperti, +9

Applied Surface Science

Materials ScienceEngineeringCorrosionSurface ScienceApplied Physics +8

Adhesion testing of atomic layer deposited TiO2 on glass substrate by the use of embedded SiO2 microspheres

Jussi Lyytinen, Maria Berdova, Sami Franssila, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringMechanical EngineeringSurface NanotechnologyThin Film Process TechnologyAtomic Layer +19

Interfacial mechanical testing of atomic layer deposited TiO₂ and Al₂O₃ on a silicon substrate by the use of embedded SiO₂ microspheres

Jussi Lyytinen, Maria Berdova, Petri Hirvonen, +4

RSC Advances

Materials ScienceMaterials EngineeringEngineeringInterfacial Mechanical EvaluationMechanical Engineering +11