Maria Berdova

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara, Xuwen Liu, Lauri Kilpi et al. · Thin Solid Films · 2013 · 183 citations

Materials Science, Materials Engineering, Aluminium Nitride +10

Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 94 citations · Full text

Engineering, Thin Film Process Technology, Chemistry +17

Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques

Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov et al. · Acta Materialia · 2013 · 53 citations

Materials Science, Aluminium Nitride, Engineering +9

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Maria Berdova, Xuwen Liu, Claudia Wiemer et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 49 citations · Full text

Hafnium Oxide-based Films, Engineering, Mechanical Engineering +19

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova, Oili Ylivaara, Ville Rontu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 20 citations · Full text

Membrane Structure, Engineering, Mechanical Engineering +16