Publication | Closed Access
Mechanical assessment of suspended ALD thin films by bulge and shaft-loading techniques
53
Citations
48
References
2013
Year
Materials ScienceAluminium NitrideEngineeringMechanical BehaviorShaft-loading TechniquesMechanical EngineeringStressstrain AnalysisSolid MechanicsThin FilmsMechanical AssessmentMechanics Of MaterialsThin Film Processing
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