Lauri Kilpi

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara, Xuwen Liu, Lauri Kilpi et al. · Thin Solid Films · 2013 · 183 citations

Materials Science, Materials Engineering, Aluminium Nitride +10

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Matti Putkonen, Markus Bosund, Oili Ylivaara et al. · Thin Solid Films · 2014 · 75 citations

Materials Science, Engineering, Silicon On Insulator +8

Tribological properties of laser-textured and ta-C coated surfaces with burnished WS2 at elevated temperatures

Jussi Oksanen, Timo J. Hakala, Sanna Tervakangas et al. · Tribology International · 2013 · 65 citations

Materials Science, Tribological Coating, Advanced Laser Processing +10

Tribocorrosion study of martensitic and austenitic stainless steels in 0.01M NaCl solution

Elina Huttunen‐Saarivirta, Lauri Kilpi, Timo J. Hakala et al. · Tribology International · 2015 · 64 citations

Materials Science, Engineering, Corrosion +8

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Oili Ylivaara, Lauri Kilpi, Xuwen Liu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 54 citations · Full text

Thin Film Physics, Engineering, Surface Nanotechnology +21