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Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringAluminum OxideApplied PhysicsHigh-performance MaterialResidual StressMaterial PerformanceChemical DepositionAtomic Layer DepositionMicrostructureAnodizing