Sakari Sintonen

Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion

Oili Ylivaara, Xuwen Liu, Lauri Kilpi et al. · Thin Solid Films · 2013 · 188 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Matti Putkonen, Markus Bosund, Oili Ylivaara et al. · Thin Solid Films · 2014 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +14

Preparation of deep UV transparent AlN substrates with high structural perfection for optoelectronic devices

C. Hartmann, J. Wollweber, Sakari Sintonen et al. · CrystEngComm · 2016 · 73 citations

Natural Sciences, Materials Engineering, Materials Science +16

Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties

Oili Ylivaara, Lauri Kilpi, Xuwen Liu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 55 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Defects in Single Crystalline Ammonothermal Gallium Nitride

Sami Suihkonen, Siddha Pimputkar, Sakari Sintonen et al. · Advanced Electronic Materials · 2017 · 52 citations

Engineering, Materials Engineering, Materials Science +17