Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 20 citations · 36 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsMaterials CharacterizationMechanical Behavior Of MaterialsAluminum OxidesAtomic Layer DepositionMembrane EngineeringMembrane MaterialsMembrane MechanicsThin Film Mechanical PropertiesHumidityMembrane Mechanical PropertiesMembrane Mechanical StrengthPressure CyclingPressure Cycling EffectsTemperature Dependence Of Fracture StrengthTemperature Effects On DepositionWeibull Model
The fracture strength of Al2O3 membranes deposited by atomic layer deposition at 110, 150, 200, and 300 °C was investigated. The fracture strength was found to be in the range of 2.25–3.00 GPa using Weibull statistics and nearly constant as a function of deposition temperature. This strength is superior to common microelectromechanical systems materials such as diamondlike carbon, SiO2, or SiC. As-deposited membranes sustained high cycling pressure loads >10 bar/s without fracture. Films featured, however, significant reduction in the resistance to failure after annealing (800 °C) or high humidity (95%, 60 °C) treatments.
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Arrelaine A. Dameron, Stephen D. Davidson, B. B. Burton et al. · The Journal of Physical Chemistry C · 2008 · 374 citations
Natural Sciences, Materials Engineering, Materials Science +17