Concepedia
Statistics
Publications
4
Citations
185
H-Index
Active since
2001
Affiliations
ASML (Netherlands)(Current)
Carl Zeiss (Germany)
Sandia National Laboratories California
Lawrence Berkeley National Laboratory
Intel (United States)
Uwe Mickan is an author at ASML (Netherlands) specializing in optics, electrical engineering, and engineering.
Publications per year
2001–2007
First performance results of the ASML alpha demo tool
H. Meiling, H.C. Meijer, Vadim Banine et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 78 citations
Engineering, Electrical Engineering, Microfabrication +5
EUV lithography with the Alpha Demo Tools: status and challenges
Noreen Harned, M. Goethals, Rogier Groeneveld et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 49 citations
Engineering, Electrical Engineering, Materials Science +8
First lithographic results from the extreme ultraviolet Engineering Test Stand
Henry N. Chapman, Avijit K. Ray-Chaudhuri, Daniel A. Tichenor et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 37 citations
Engineering, Electrical Engineering, Optics +10
<title>Initial results from the EUV engineering test stand</title>
Daniel A. Tichenor, Avijit K. Ray-Chaudhuri, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations
Natural Sciences, Physics, Digital Imaging +8
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