Concepedia

Daniel Babbs

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Statistics

Publications

3

Citations

98

H-Index

3

Active since

2003

Affiliations

Lam Research (United States)(Current)

Daniel Babbs is an author at Lam Research (United States) specializing in nanolithography, 3d printing, and microfabrication.

Top concepts

Publications per year

2003–2004

3

Publications

3

Step and Repeat UV nanoimprint lithography tools and processes

Ian McMackin, Jin Choi, Philip Schumaker et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 55 citations

, , +14

Development of imprint materials for the Step and Flash Imprint Lithography process

Frank Xu, Nicholas A. Stacey, M. Watts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Design and performance of a step and repeat imprinting machine

Ian McMackin, Philip Schumaker, Daniel Babbs et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

, , +19

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