Concepedia

Makoto Muramatsu

MM

Statistics

Publications

22

Citations

591

H-Index

14

Active since

2003

Affiliations

Tokyo Electron (Japan)(Current)

National Institute of Advanced Industrial Science and Technology

Toshiba (Japan)

National Institute for Materials Science

University of Tsukuba

Makoto Muramatsu is an author at Tokyo Electron (Japan) specializing in materials science, engineering, and applied physics.

Top concepts

Publications per year

2003–2017

22

Publications

22

Oxygen permeability and free volume hole size in ethylene–vinyl alcohol copolymer film: temperature and humidity dependence

Makoto Muramatsu, Masayuki Okura, Keiichi Kuboyama et al. · Radiation Physics and Chemistry · 2003 · 106 citations

, , +10

Pattern scaling with directed self assembly through lithography and etch process integration

Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations

, , +24

Evidence for pore surface dependent positronium thermalization in mesoporous silica/hybrid silica films

Chunqing He, Toshiyuki Ohdaira, Nagayasu Oshima et al. · Physical Review B · 2007 · 52 citations

, , +10

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

, , +18

Free volume behavior in spincast thin film of polystyrene by energy variable positron annihilation lifetime spectroscopy

Seisuke Ata, Makoto Muramatsu, J. Takeda et al. · Polymer · 2009 · 37 citations

, , +8

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