Makoto Muramatsu

Oxygen permeability and free volume hole size in ethylene–vinyl alcohol copolymer film: temperature and humidity dependence

Makoto Muramatsu, Masayuki Okura, Keiichi Kuboyama et al. · Radiation Physics and Chemistry · 2003 · 106 citations

Materials Science, Polymer Material, Engineering +10

Pattern scaling with directed self assembly through lithography and etch process integration

Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations

Engineering, Electron-beam Lithography, Pattern Transfer +24

Evidence for pore surface dependent positronium thermalization in mesoporous silica/hybrid silica films

Chunqing He, Toshiyuki Ohdaira, Nagayasu Oshima et al. · Physical Review B · 2007 · 52 citations

Materials Science, Molecular Sieve, Engineering +10

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

Engineering, Electron-beam Lithography, Wet Development Process +18

Free volume behavior in spincast thin film of polystyrene by energy variable positron annihilation lifetime spectroscopy

Seisuke Ata, Makoto Muramatsu, J. Takeda et al. · Polymer · 2009 · 37 citations

Materials Science, Engineering, Polymer Solution +8