Concepedia
Statistics
Publications
22
Citations
596
H-Index
14
Active since
2003
Affiliations
Tokyo Electron (Japan)(Current)
National Institute of Advanced Industrial Science and Technology
Toshiba (Japan)
National Institute for Materials Science
University of Tsukuba
Makoto Muramatsu is an author at Tokyo Electron (Japan) specializing in materials science, materials engineering, and natural sciences.
Publications per year
2003–2017
Oxygen permeability and free volume hole size in ethylene–vinyl alcohol copolymer film: temperature and humidity dependence
Makoto Muramatsu, Masayuki Okura, Keiichi Kuboyama et al. · Radiation Physics and Chemistry · 2003 · 107 citations
Natural Sciences, Materials Engineering, Materials Science +16
Pattern scaling with directed self assembly through lithography and etch process integration
Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations
Engineering, Materials Engineering, Materials Science +16
Evidence for pore surface dependent positronium thermalization in mesoporous silica/hybrid silica films
Chunqing He, Toshiyuki Ohdaira, Nagayasu Oshima et al. · Physical Review B · 2007 · 52 citations
Contact hole shrink process using graphoepitaxial directed self-assembly lithography
Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text
Free volume behavior in spincast thin film of polystyrene by energy variable positron annihilation lifetime spectroscopy
Seisuke Ata, Makoto Muramatsu, J. Takeda et al. · Polymer · 2009 · 38 citations
Natural Sciences, Materials Science, Physics +14
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